Khoom Description
Lub plawv ntawm cleanroom manufacturing,Semiconductor Vacuum Pumpsyog cov precision-engineered kom tau raws li cov kev cai nruj heev ntawm microelectronics fabrication. Cov twj no yog tsim los ua kom muaj kev huv huv, ruaj khov, thiab kev co- ib puag ncig lub tshuab nqus tsev, uas yog qhov tseem ceeb heev rau cov txheej txheem uas txawm tias microscopic paug tuaj yeem ua rau cov khoom lag luam puas tsuaj.khoomuniversally ntiav cov roj-dawb thiab corrosion- cov qauv tsim, feem ntau siv cov khoom tshwj xeeb uas tuaj yeem tiv taus cov txheej txheem hnyav. Lawv ua tiav qhov tsim nyog lub tshuab nqus tsev siab, feem ntau nqes mus rau 0.001 Pascal, nrog cov kev hloov pauv hloov tau thiab raug tsim los ua kom pom qhov tsis tshua muaj kev vibration profiles los tiv thaiv kev puas tsuaj rau cov ilv nanostructures.
Lawv lub tswv yim tsim qauv tso cai rau kev sib koom ua ke ncaj qha rau hauv cov cuab yeej nyuaj thiab ua kom yooj yim rau kev pabcuam, uas yog qhov tseem ceeb rau kev txo qis cov cuab yeej poob qis. Thawj daim ntawv thov ntawmSemiconductor Vacuum Pumpsyog, raws li lub npe implies, nyob rau hauv lub semiconductor kev lag luam, qhov twg lawv yog siv nyob rau hauv yuav luag txhua txhua kauj ruam ntawm chips, los ntawm etching thiab deposition mus rau ion implantation thiab lithography. Lawv kuj tseem ceeb heev hauv cov haujlwm muaj feem xyuam xws li kev ntim khoom hluav taws xob thiab kev tsim hluav taws xob photovoltaic. Tshaj li cov khoom siv hluav taws xob, cov twj tso kua mis no yog siv rau hauv cov khoom siv roj hmab thiab yas rau kev ua cov khoom siv qib siab -purity semiconductor- qib. Hauv kev ntim khoom noj, lawv pab tsim cov ntim tshwj xeeb rau cov khoom siv hluav taws xob rhiab heev. Tsis pub dhau lub tshuab nqus tsev vacuum,khoomyog qhov tseem ceeb rau kev ua cov semiconductor- qib txheej txheej txheem uas xav tau qhov kawg purity thiab kev ntseeg tau. Thaum txoj kev vam meej ntawm koj cov txheej txheem nyob ntawm lub tshuab nqus tsev tsis zoo thiab tsis hloov pauv,Semiconductor Vacuum Pumpsyog cov kev daws teeb meem tseeb thiab ntseeg tau.
|
Basic tsis |
ntaus ntawv |
||||
|
DLT.LG180 |
DLT.LG360 |
LWB 630 |
DLT.LG800 |
DLT.LG1100 |
|
|
Pump ceev, m3/h |
143 |
354 |
625 |
780 |
994 |
|
Qhov kawg siab, Pa |
2 |
2 |
1 |
1 |
1 |
|
Kev sib hloov ceev, r / min |
2900 |
2900 |
2900 |
2900 |
2900 |
|
Suab nrov Lp, dB(A) |
82 |
83 |
83 |
84 |
85 |
|
Kev siv dej ntau tshaj, L / min |
8 |
15 |
25 |
35 |
45 |
|
Inlet txoj kab uas hla, mm |
50 |
50 |
65 |
100 |
100 |
|
Exhaust chaw nres nkoj, mm |
40 |
40 |
50 |
80 |
80 |
|
Lub cev muaj zog, kW |
4 |
7.5 |
15 |
18.5 |
22 |
|
Lub taub hau hnyav, kg |
245 |
350 |
550 |
630 |
780 |
Cim npe nrov: Tuam Tshoj semiconductor nqus tsev vacuum twj manufacturers, lwm tus neeg, Hoobkas